Optischer Wellenleitermodulator mit Selektiv Entferntem Substrat

Details

Veröffentlichungs-Nr.

EP4796986

Anmeldetag

10. Februar 2026

Veröffentlichung

26. August 2026

Rechtsraum

EP

IPC

G02F1/025, G02F1/21, G02F1/225

Abstract

An integrated circuit includes a substrate having a main surface and an electrical transmission line extending along the main surface. The electrical transmission line includes a metallic travelling wave electrode (TWE) having a lengthwise sequence of spaced apart openings absent of the metallic material. The substrate has cavities under at least some of the openings. In an example implementation, the TWE is a middle electrode of an electrical transmission line driving an MZM, and the cavities in the substrate extend under side electrodes of the transmission line.

Anmelder

Firma

Nokia Solutions and Networks Oy

Land

🇫🇮 Finnland

Fachgebiete