Verfahren und Beschichtungsanordnung zum Beschichten eines Metallischen Substrats

Details

Veröffentlichungs-Nr.

EP4803652

Anmeldetag

4. März 2025

Veröffentlichung

9. September 2026

Rechtsraum

EP

Abstract

The present disclosure relates to a coating arrangement (1) for coating a metallic substrate (10) extending along a longitudinal direction (x), the coating arrangement (1) comprising: - a vacuum chamber (2) to receive the metallic substrate (10), - an evaporation device (20) arranged inside the vacuum chamber (2) and configured to evaporate an evaporation material (17), the evaporation device (20) comprising a vapor outlet (28) extending in a transverse direction (y) relative to the longitudinal direction (x) to direct a vapor cloud (19) towards the substrate (10), - a first magnetron sputter source (40) arranged inside the vacuum chamber (2) longitudinally adjacent to the vapor outlet (28) and configured to generate a plasma (52) of a plasma material within a plasma zone (54), and - wherein the evaporation device (20) and the first magnetron sputter source (40) are configured such, that the vapor cloud (19) and the plasma zone (54) at least partially overlap.

Anmelder

Firma

NEOVAC GmbH

Land

🇩🇪 Deutschland