Optische Inspektionsvorrichtung, Optisches Inspektionssystem, Optisches Inspektionsverfahren und Optisches Inspektionsprogramm

Details

Veröffentlichungs-Nr.

EP4803889

Anmeldetag

18. September 2025

Veröffentlichung

9. September 2026

Rechtsraum

EP

IPC

G01N21/88

Abstract

In an approach, an optical inspection apparatus includes: an imaging portion and an illumination portion. The imaging portion acquires a plurality of images by repeatedly photographing an object on an optical axis of the imaging portion, the object moving relative to the optical axis in a moving direction that is a predetermined axial direction, in such a manner as to cross the optical axis. The illumination portion radiates, in a plane including the optical axis of the imaging portion and the moving direction, at a time of imaging by the imaging portion, first illumination light at a first object point on a surface of the object, and second illumination light traveling in a direction different from the first illumination light at a second object point different from the first object point, a distribution of the first illumination light and the second illumination light being asymmetric in the plane.

Anmelder

Firmen

KABUSHIKI KAISHA TOSHIBA
Toshiba Information Systems (Japan) Corporation

Land

🇯🇵 Japan

Fachgebiete