Ultraschallwandler, Verfahren zur Übertragung einer Ultraschallwelle und Verfahren zur Detektion einer Ultraschallwelle

Details

Veröffentlichungs-Nr.

EP4806562

Anmeldetag

11. März 2025

Veröffentlichung

16. September 2026

Rechtsraum

EP

IPC

B06B1/02, B06B1/06

Abstract

An ultrasonic transducer (100) comprising: a substrate (110) comprising a frontside (110a) configured to face an external medium (190) for propagation of an ultrasound wave; and a membrane (120) arranged to be suspended at a distance from a cavity surface (135) of the substrate (110a) for defining a cavity (130) between the membrane, the cavity surface (135), and at least one cavity wall (140), wherein the membrane is configured to transversally vibrate; wherein the ultrasonic transducer (100) comprises a venting hole (160) at the frontside (110a) and a venting channel (180) configured to connect the cavity (130) to the venting hole (160); wherein the transducer (100) has an acoustic resonance frequency and the membrane (120) has a membrane resonance frequency, and wherein the ultrasonic transducer (100) is configured to provide transduction for the ultrasound wave having a frequency corresponding to the acoustic resonance frequency.

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien

Fachgebiete