Vakuumpumpe und Darin Verwendete Zuflussführungskomponente

Details

Veröffentlichungs-Nr.

EP4807190

Anmeldetag

5. November 2024

Veröffentlichung

15. Mai 2025

Rechtsraum

EP

IPC

F04D19/04

Abstract

In a Siegbahn type exhaust mechanism, the back pressure dependence is improved while limiting a decrease in the exhaust speed. A vacuum pump includes: a casing having an inlet port; a rotor shaft disposed within the casing; one or more rotating discs rotatable with the rotor shaft; and one or more stator discs that are disposed to be opposed to the respective one or more rotating discs in an axial direction and have a spiral groove including a ridge portion and a valley portion in an opposed surface. The vacuum pump is configured to form a gas flow passage with the spiral groove opposed to the one or more rotating discs, and is configured to exhaust gas that is introduced through the inlet port by interaction between the one or more rotating discs and the one or more stator discs. The vacuum pump includes an inflow guide portion that is configured to guide an inflow of the gas and disposed on a side of a first rotating disc that corresponds to the inlet port, and the first rotating disc is one of the one or more rotating discs that is on a side corresponding to the inlet port.

Anmelder

Firma

Edwards Japan Limited

Land

🇯🇵 Japan

Fachgebiete