Ventile für Massendurchflussregler

Details

Veröffentlichungs-Nr.

EP4810841

Anmeldetag

17. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

F16K31/06

Abstract

A disclosed example valve for a mass flow controller is provided. The valve includes a coil, a central stem (110) surrounded by the coil, and a housing (106) to contain the coil and the central stem. A plunger having a first end arranged within the central stem and surrounded by the coil, and a second end is configured to mate with an orifice block within a base (102) of a flow body in a first closed position, wherein an airgap is formed between a surface of the second end of the plunger and a base of the central stem.

Anmelder

Firma

Illinois Tool Works Inc.

Land

🇺🇸 USA

Fachgebiete