Vorrichtung und Verfahren zur Detektion einer Flüssigkeitsoberfläche

EP4810921 22. Mai 2025

Anmelder: Hitachi High-Tech Corporation 🇯🇵

Details

Veröffentlichungs-Nr.
EP4810921
Anmeldetag
7. Oktober 2024
Veröffentlichung
22. Mai 2025
Rechtsraum
EP
Offizieller Volltext

Abstract

The purpose of the present invention is to provide a liquid surface detection apparatus for determining, even in a non-contact manner, a liquid surface position with higher accuracy. For this purpose, the liquid surface detection apparatus of the present invention is provided with: a first liquid surface detection mechanism that detects, in a non-contact manner, the upper surface of a liquid in a container; a second liquid surface detection mechanism that detects, in a contact manner, the upper surface of the liquid in the container; and a control device that uses the detection result from the second liquid surface detection mechanism to correct the detection result from the first liquid surface detection mechanism. Preferably, the control device has a storage unit for storing a correction value for correcting the detection result from the first liquid surface detection mechanism. The correction value is calculated on the basis of a difference between a liquid surface position detected by the first liquid surface detection mechanism and a liquid surface position detected by the second liquid surface detection mechanism.

Anmelder

Firma
Hitachi High-Tech Corporation
Land
🇯🇵 Japan
🇯🇵 Hitachi High-Tech Corporation

Japanisches Unternehmen der Hitachi-Gruppe, spezialisiert auf Analysegeräte, medizinische Diagnostik und Fertigungsanlagen für die Halbleiterindustrie.

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