Verfahren zur Herstellung eines Anorganischen Ausrichtungsfilms, Flüssigkristallvorrichtung und Elektrooptische Vorrichtung

Details

Veröffentlichungs-Nr.

EP4811027

Anmeldetag

17. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

G02F1/1337

Abstract

A method for manufacturing an inorganic alignment film includes a first step of forming pixel electrodes at a substrate; a second step of forming a first film by vapor deposition so as to cover the substrate and the pixel electrodes, the first film having multiple first columns each having a major axis direction being a direction along a Z-axis; a third step of forming a second film on the multiple first columns by vapor deposition, the second film having multiple second columns each having a major axis direction that intersects at a first angle with the direction along the Z-axis; a fourth step of forming a protective film on the multiple second columns by atomic deposition; and a fifth step of forming a third film on the protective film by vapor deposition, the third film having multiple third columns each having a major axis direction inclining by a second angle smaller than the first angle with respect to the direction along the Z-axis, the third film being thinner than the second film.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete