Prägeverfahren, Prägevorrichtung und Artikelherstellungsverfahren

Details

Veröffentlichungs-Nr.

EP4811041

Anmeldetag

19. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

G03F7/20, G03F9/00, G03F7/00

Abstract

Imprint processing is performed for each of shot regions that can be classified into first type enabling use of predetermined number of alignment marks and second type disabling use of the predetermined number of alignment marks. Method includes controlling imprint processing sequence to alternately execute imprint processing for the first type and the second type, performing first imprint process of measuring alignment error, with respect to the first type, between the shot region and pattern region of mold by using the predetermined number of alignment marks and performing the imprint processing based on the alignment error, and performing second imprint process of performing the imprint processing for the second type based on alignment error between the shot region and the pattern region by using usable alignment marks and the alignment error obtained in the latest first imprint process.

Anmelder

Firma

Canon Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete