Aberrationskorrektur-Reflektorvorrichtung, Aberrationskorrektursystem und Verfahren dafür

Details

Veröffentlichungs-Nr.

EP4811415

Anmeldetag

16. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

H01J37/153

Abstract

The present application relates to the field of optics, and more particularly to an aberration correction reflector apparatus, an aberration correction system, and a method thereof. The aberration correction reflector apparatus includes a reflector and a transmission electrode group coaxially spaced from one side of the reflector, the transmission electrode group includes four or more transmission electrodes coaxially spaced apart. The reflector includes a reflector body, a first through hole for electrons to pass through is arranged at a center of the reflector body and passes through upper and lower surfaces of the reflector body, the reflector further includes a cover disposed on a side of the first through hole away from the transmission electrode group, the cover protrudes toward a direction away from the transmission electrode group. Each transmission electrode includes a transmission electrode body, and a second through hole for electrons to pass through is arranged at a center of the transmission electrode body and passes through upper and lower surfaces of the transmission electrode body. The correction system adopting the aberration correction reflector apparatus can simultaneously correct chromatic aberration, third-order spherical aberration, and fifth- order spherical aberration.

Anmelder

Firma

Quantum Science Center of Guangdong-Hongkong- Macao Greater Bay Area

Land

🇨🇳 China

Fachgebiete