Trägervorrichtung und Teilchenstrahlvorrichtung und Optische Inspektionsvorrichtung damit

Details

Veröffentlichungs-Nr.

EP4811417

Anmeldetag

16. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

Abstract

A stage device capable of preventing elastic deformation of a stage, and a charged particle beam apparatus and an optical inspection apparatus including the same are provided. The stage device includes: a stage configured to hold a sample; a horizontal drive unit configured to drive the stage in a horizontal direction; a vertical drive unit configured to drive the stage in a vertical direction; and a control unit configured to control the horizontal drive unit and the vertical drive unit. The control unit inverts phases of the horizontal drive unit and the vertical drive unit at a specific frequency calculated based on a frequency property when the stage is driven in the horizontal direction and a frequency property when the stage is driven in the vertical direction.

Anmelder

Firma

Hitachi High-Tech Corporation

Land

🇯🇵 Japan