Defektinspektionsvorrichtung, Substratbindungsvorrichtung und Defektinspektionsverfahren

Details

Veröffentlichungs-Nr.

EP4815703

Anmeldetag

4. Februar 2026

Veröffentlichung

30. September 2026

Rechtsraum

EP

Abstract

A defect inspection apparatus (1) includes a heater unit (9) to emit infrared rays (F2) to a substrate (W) held by a substrate holding unit (8) and heat the substrate (W), an infrared camera (10) to face a first principal surface (Wa) of the substrate (W) and image an imaging region (24) on the first principal surface (Wa); a heat insulating member (31) to absorb the infrared rays (F2) emitted by the heater unit (9), and a heat insulating member moving unit (50) to move the heat insulating member (31) between a heat insulation position (P10) where the heat insulating member (31) and the imaging region (24) overlap each other when viewed from a normal direction (Z) of the first principal surface (Wa) and a retracted position (P2) where the heat insulating member (31) and the imaging region (24) do not overlap each other when viewed from the normal direction (Z). The substrate holding unit (8) may be positioned between the heater unit (9) and the infrared camera (10) in the normal direction (z).

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan