Herstellungsausführungssteuerungssystem, Herstellungsausführungssteuerungsverfahren und Herstellungsausführungssteuerungsprogramm

Details

Veröffentlichungs-Nr.

EP4818834

Anmeldetag

25. März 2026

Veröffentlichung

7. Oktober 2026

Rechtsraum

EP

IPC

G05B19/418

Abstract

To provide a manufacturing execution control system capable of shortening a processing lead time of a priority lot in a manufacturing line. In a manufacturing execution control system 1000, a virtualization processing apparatus 110 collects processing information by using a predetermined substrate cleaning apparatus group i as a hub in a wafer processing sequence, and, from an existing MES 100 side, the substrate cleaning apparatus group i is virtually identified and controlled as a single manufacturing apparatus using a single piece of identification information. Information for specifying a priority lot and information indicating priority are shared among group control apparatuses 310.i to 310.i+2 that control the substrate cleaning apparatus group i, and preparation for processing of the priority lot is notified in advance from a group control apparatus of a preceding process to a group control apparatus of a subsequent process. In the substrate cleaning apparatus group i of the subsequent process, preparation for processing the priority lot is performed in advance, thereby enabling the priority lot to be processed by overtaking other normal lots.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete