Kryopumpe

Details

Veröffentlichungs-Nr.

EP4822179

Anmeldetag

12. Februar 2026

Veröffentlichung

14. Oktober 2026

Rechtsraum

EP

IPC

F04B37/08, F04B37/14

Abstract

A cryopump (10) includes a radiation shield (30) that is thermally coupled to a first cooling stage (22) of a cryocooler (14) and that extends in an axial direction from a cryopump intake port (12) into a cryopump container (16), and a plurality of cryopanels (41, 42, 43) that are thermally coupled to a second cooling stage (24) of the cryocooler (14) and that are arranged in the axial direction inside the radiation shield (30). The plurality of cryopanels (41, 42, 43) include a top cryopanel (41) closest to the cryopump intake port (12) in the axial direction, and at least one cryopanel (42, 43) disposed with a space from the top cryopanel (41) in the axial direction. The top cryopanel (41) includes an opening (46) through which a gas passes into a space between the top cryopanel (41) and the at least one cryopanel (42, 43). An object of the present invention is to improve a sorption amount of a cryopump (10) while suppressing an influence on a pumping speed.

Anmelder

Firma

Sumitomo Heavy Industries, Ltd.

Land

🇯🇵 Japan

Fachgebiete