Kryopumpe

Details

Veröffentlichungs-Nr.

EP4822180

Anmeldetag

25. Februar 2026

Veröffentlichung

14. Oktober 2026

Rechtsraum

EP

IPC

F04B37/08

Abstract

An object is to improve a sorption amount of a cryopump (10). A cryopump (10) includes a radiation shield (30) that is thermally coupled to a first cooling stage (22) of a cryocooler (14) and that extends from a cryopump intake port (12) into a cryopump container (16) in an axial direction such that a shield outer-side gap (31) is formed between the cryopump container (16) and the radiation shield (30), and a plurality of cryopanels (41, 42, 43) that are thermally coupled to a second cooling stage (24) of the cryocooler (14) and that are arranged in the axial direction in an inner space (36) of the radiation shield (30). The plurality of cryopanels (41, 42, 43) include a bottom cryopanel (43) disposed closest to the container bottom portion (16c) among the plurality of cryopanels (41, 42, 43) in the axial direction. The radiation shield (30) includes a shield lower portion (30b) extending toward the container bottom portion (16c) beyond the bottom cryopanel (43) in the axial direction, and the shield lower portion (30b) defines a shield bottom opening (34) that connects the shield outer-side gap (31) to the inner space (36).

Anmelder

Firma

Sumitomo Heavy Industries, Ltd.

Land

🇯🇵 Japan

Fachgebiete