Inspektionsvorrichtung und Inspektionsverfahren

Details

Veröffentlichungs-Nr.

EP4822325

Anmeldetag

24. September 2024

Veröffentlichung

4. September 2025

Rechtsraum

EP

Abstract

An inspection device 1 includes: a pulse forming unit 3 that generates a pulse train Pb in which a plurality of optical pulses Pb1 and Pb2 having different center wavelengths are arranged at predetermined time intervals; a first adjustment unit 4 that matches a polarization direction of each of the optical pulses Pb1 and Pb2 of the pulse train Pb input to a photonic integrated circuit 5 with an in-plane direction of a substrate 50; a correlation optical system 7 that has polarization dependence in a predetermined polarization direction and generates correlation light Pc of the pulse train Pb output from the photonic integrated circuit 5; an optical detection unit 8 that detects a time waveform of the correlation light Pc; and a determination unit 9 that determines whether the photonic integrated circuit 5 is acceptable or defective based on the time waveform. The optical detection unit 8 detects the time waveform multiple times, and the determination unit 9 determines whether the photonic integrated circuit 5 is acceptable or defective based on a plurality of feature quantities in the time waveform detected multiple times.

Anmelder

Firmen

Hamamatsu Photonics K.K.
Vrije Universiteit Brussel

Land

🇯🇵 Japan