Inspektionsvorrichtung und Inspektionsverfahren

Details

Veröffentlichungs-Nr.

EP4822326

Anmeldetag

24. September 2024

Veröffentlichung

4. September 2025

Rechtsraum

EP

Abstract

An inspection device 1 includes: a pulse forming unit that generates a pulse train Pb in which a plurality of optical pulses Pb1 and Pb2 having different center wavelengths are arranged at predetermined time intervals; an optical detection unit 8 that detects a time waveform of the pulse train Pb output from the photonic integrated circuit 5; and an evaluation unit 9 that evaluates the photonic integrated circuit 5 based on the feature quantity of the time waveform. The evaluation unit 9 calculates, based on the feature quantity of the time waveform corresponding to each of the plurality of waveguides having different known lengths, an amount of change in the feature quantity of the time waveform with respect to the length of the waveguide, and calculates a feature quantity of a time waveform of another structure based on the amount of change.

Anmelder

Firmen

Hamamatsu Photonics K.K.
Vrije Universiteit Brussel

Land

🇯🇵 Japan