Substratverarbeitungsvorrichtung und Artikelherstellungsverfahren

Details

Veröffentlichungs-Nr.

EP4826448

Anmeldetag

15. April 2026

Veröffentlichung

21. Oktober 2026

Rechtsraum

EP

IPC

G03F7/00, H10P72/76

Abstract

A substrate processing apparatus comprises a stage (20) configured to hold a substrate (16); a hand (42, 43) configured to convey the substrate; and a controller (30) configured to control at least one of a substrate supply operation onto the stage by the hand and a substrate collection operation from the stage by the hand. A chuck (21) selected from among a plurality of types of chucks is mounted on the stage, and pins (22) configured to protrude from the chuck and support the substrate in the at least one are provided in the stage. The controller is configured to control, in accordance with the thickness of the chuck mounted on the stage, a height of the hand when inserting/removing the hand between the substrate on the pins and the chuck in the at least one.

Anmelder

Firma

Canon Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete