Laseratomsonde und Laseratomsonden-Analyseverfahren

Details

Veröffentlichungs-Nr.

EP2434521

Aktenzeichen

EP11181316

Anmeldetag

15. September 2011

Veröffentlichung

5. August 2015

Rechtsraum

EP

IPC

H01J37/285H01J37/22// H01J49/00B82Y35/00

Abstract

The invention is related to a laser atom probe system comprising a specimen holder (7) whereon a specimen (2) to be analyzed may be mounted, the specimen having a tip shape, a detector (3), an electrode (1), arranged between the specimen holder (7) and the detector (3), a voltage source (4) configured to apply a voltage difference between the specimen tip and the electrode, at least one laser system (5,8), configured to direct a laser beam laterally at the specimen tip, and a tip shape monitoring means (10) configured to detect and monitor the tip shape, and/or a means for altering and/or controlling one or more laser parameters of said laser beam(s) so as to maintain, restore or control said specimen tip shape.

Anmelder

Firma

IMEC

Land

🇧🇪 Belgien

Fachgebiete