Massenspektrometer

EP2450942 Art B1 6. November 2019

Anmelder: Hitachi High-Tech Corporation, Hitachi High-Technologies Corporation 🇯🇵

Details

Veröffentlichungs-Nr.
EP2450942
Aktenzeichen
EP11188188
Anmeldetag
8. November 2011
Veröffentlichung
6. November 2019
Erteilung
6. November 2019
Rechtsraum
EP
IPC
H01J49/24H01J49/04H01J49/10H01J49/00
Offizieller Volltext

Abstract

A mass spectrometer (100) of reduced size and weight is provided which is capable to conduct highly accurate mass spectroscopy. The mass spectrometer (100) includes an ion source (101) adapted to ionize gas (23) flowing in from outside in order to ionize a measurement sample (4) and a mass spectroscopy section (102) for separating the ionized measurement sample (4). The ion source (101) has its interior reduced in pressure by differential pumping from the mass spectroscopy section (102) and ionizes the gas (23) when the interior pressure rises as it inhales the gas (23), and the mass spectroscopy section (102) separates the ionized measurement sample (4) when its interior pressure falls after inhale of the gas (23). The mass spectrometer (100) may further include a restriction device (9) for suppressing a flow rate of the gas (23) the ion source (101) inhales and an open/close device (8), e.g. a pulse valve, for opening and closing a flow of the gas (23) the ion source (101) inhales.

Anmelder

Firmen
Hitachi High-Tech Corporation
Hitachi High-Technologies Corporation
Land
🇯🇵 Japan
🇯🇵 Hitachi High-Tech Corporation

Japanisches Unternehmen der Hitachi-Gruppe, spezialisiert auf Analysegeräte, medizinische Diagnostik und Fertigungsanlagen für die Halbleiterindustrie.

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