Verfahren zur Herstellung einer axialen Ausrichtung eines geladenen Teilchenstrahls und geladenes Teilchenstrahlsystem

Details

Veröffentlichungs-Nr.

EP2453463

Aktenzeichen

EP11189121

Anmeldetag

15. November 2011

Veröffentlichung

3. Mai 2017

Erteilung

3. Mai 2017

Rechtsraum

EP

IPC

H01J37/153H01J37/147H01J37/26

Abstract

A method of making axial alignment of a charged particle beam (20) relative to at least three stages of multipole elements (11, 12, 13) is offered. Also, a charged particle beam system capable of making the axial alignment is offered. At least three astigmatic fields are produced. Some parts of the orbit of the beam or the distributions of the astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis (OP) such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel out each other.

Anmelder

Firmen

JEOL LTD.
JEOL Ltd.

Land

🇯🇵 Japan

Fachgebiete