Vertikale MEMS-Kammstruktur mit linearem Antrieb / linearer Aufnahme
Anmelder: Honeywell International Inc., Honeywell International, Inc. 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP2455327
- Aktenzeichen
- EP11190200
- Anmeldetag
- 22. November 2011
- Veröffentlichung
- 25. August 2021
- Erteilung
- 25. August 2021
- Rechtsraum
- EP
- IPC
- B81B3/00
Abstract
A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs. The proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one anchor having a second plurality of combs. The anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate. The first plurality of combs are interleaved with the second plurality of combs. Each of the combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that capacitance between the combs varies approximately linearly with displacement of the movable combs in an out-of-plane direction.
Anmelder
- Firmen
- Honeywell International Inc.
Honeywell International, Inc. - Land
- 🇺🇸 USA
US-amerikanischer Mischkonzern mit Schwerpunkten in Luft- und Raumfahrttechnik, Automatisierungslösungen, Gebäudetechnik sowie Spezialchemikalien und -materialien für Industrie- und Verteidigungskunden.
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Buckley, Guy Julian
NoneBakewell