Elektronenstrahlsystem, dessen Elektronquelle mit auswählbaren mehrfachen Elektronenelemittern vorgesehen ist

Details

Veröffentlichungs-Nr.

EP2472556

Aktenzeichen

EP11194720

Anmeldetag

21. Dezember 2011

Veröffentlichung

9. November 2016

Erteilung

9. November 2016

Rechtsraum

EP

IPC

H01J37/26H01J37/28H01J37/06H01J37/08H01J37/147

Abstract

A charged particle source (202) for a focused particle beam system (200) such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM), or focused ion beam (FIB) system is disclosed. The source employs a multiplicity of independently-addressable emitters within a small region which can be centered on the axis of the charged particle system. All of the emitters may be individually controlled to enable emission from one or more tips simultaneously. A mode with only one emitter activated corresponds to high brightness, while modes with multiple emitters simultaneously activated provides high angular intensities with lower brightness. Source lifetimes can be extended through sequential use of single emitters. A combined mechanical and electrical alignment procedure for all emitters is described.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete