Detektionsverfahren zur Verwendung in der Mikroskopie mit geladenen Teilchen

Details

Veröffentlichungs-Nr.

EP2487704

Aktenzeichen

EP12155058

Anmeldetag

13. Februar 2012

Veröffentlichung

8. Januar 2014

Erteilung

8. Januar 2014

Rechtsraum

EP

IPC

H01J37/244H01J37/28

Abstract

A method of investigating a sample using a charged-particle microscope, comprising the steps of: - Providing a charged-particle microscope, having a particle-optical column; - Using the particle-optical column to direct an imaging beam of charged particles at the sample; - Irradiating the sample with the imaging beam, as a result of which a flux ("Photon Flux") of output radiation is caused to emanate from the sample; - Examining at least a portion of said output radiation using a detector, which method comprises the following additional steps: - Embodying said detector to comprise a Solid State Photo-Multiplier (1) that is connected to a power supply providing an adjustable electrical bias ("MPPC Bias"); - Adjusting said bias so as to adjust a gain value ("MPPC Gain") of the Solid State Photo-Multiplier; - Matching said gain value to the magnitude of said flux, so as to cause the Solid State Photo-Multiplier to operate below its saturation threshold. A Solid State Photo-Multiplier is also sometimes referred to as a Silicon Photo-Multiplier (SiPM), on-chip pixelated Avalanche Photodiode array (with shared/common detection circuitry), MPPC®, etc.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete