Stabile, Kalte Feldemissionselektronenquelle
Anmelder: FEI Company 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP2492949
- Aktenzeichen
- EP12155682
- Anmeldetag
- 16. Februar 2012
- Veröffentlichung
- 14. Juni 2017
- Erteilung
- 14. Juni 2017
- Rechtsraum
- EP
- IPC
- H01J37/063H01J37/073
Abstract
A cold field emission (CFE) electron source for a focused electron beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), or scanning electron microscope (SEM) is disclosed which substantially improves both source emission stability and frequency noise characteristics. The source employs an emitter enclosure electrode (552) behind the CFE tip (503) which, in conjunction with the extractor electrode (508), defines a closed volume that can be thoroughly cleaned by electron impact desorption (EID) and radiative heating from a heated filament (530) located between the emitter enclosure electrode and extractor electrode.
Anmelder
- Firma
- FEI Company
- Land
- 🇺🇸 USA
US-amerikanischer Hersteller von Elektronenmikroskopen und wissenschaftlichen Bildgebungssystemen, seit 2016 Teil von Thermo Fisher Scientific. Patente betreffen Elektronen- und Ionenmikroskopie sowie Materialanalyse.
506 Patente in unserer Datenbank
Fachgebiete
-
Bakker, Hendrik
NoneEindhoven