Wärmekonditionierungssystem zur Wärmekonditionierung eines Teils einer lithografischen Vorrichtung und Wärmekonditionierungsverfahren

Details

Veröffentlichungs-Nr.

EP2515170

Aktenzeichen

EP12160191

Anmeldetag

19. März 2012

Veröffentlichung

19. Februar 2020

Erteilung

19. Februar 2020

Rechtsraum

EP

IPC

G03F7/20

Abstract

A two-phase thermal conditioning system for thermal conditioning a part (1) of a lithographic apparatus, includes an evaporator (3) to be positioned in thermal contact with the part of the lithographic apparatus for extracting heat from the part by evaporation of a fluid inside the evaporator; a condenser (5) to be positioned at a distance from the part of the lithographic apparatus for removing heat from the fluid inside the condenser by condensation of the fluid inside the condenser; fluid lines (7,8,9) arranged between the evaporator and the condenser to form a circuit in which fluid is able to flow; a pump (14) arranged in the circuit to circulate the fluid in the circuit; an accumulator (16) configured to hold fluid, wherein the accumulator is in fluid communication with the circuit and comprises a heat exchanger (18) to transfer heat from or to fluid inside the accumulator; a temperature sensor (23) configured to provide a measurement signal representative of the temperature of the fluid; and a controller (27) configured to maintain a substantially constant temperature of the fluid inside the circuit by regulating the amount of heat transferred by the heat exchanger from or to fluid inside the accumulator based on the measurement signal.

Anmelder

Firma

ASML Netherlands BV

Land

🇳🇱 Niederlande

Fachgebiete