Verfahren und Struktur zur Steuerung von Magnetfeldverteilungen in einem ExB-Wien-Filter
Anmelder: FEI Company 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP2525384
- Aktenzeichen
- EP12167972
- Anmeldetag
- 15. Mai 2012
- Veröffentlichung
- 1. Februar 2017
- Erteilung
- 1. Februar 2017
- Rechtsraum
- EP
- IPC
- H01J37/05H01J37/15H01J49/28
Abstract
An ExB Wien mass filter (700) providing a method and structure for mechanically adjusting the magnetic field distributions at the mass filter entrance and exit end caps (722 and 726, respectively). The reluctance of the flux return path may be modified by configuring pluralities of magnetic shims (790, 796) within slots (750, 756) at the outer diameters of the entrance and exit end caps, and also by configuring pluralities of magnetic plug shims (906) within circular flux dams (902) surrounding the entrance and exit apertures (724 and 728, respectively). Advantages of purely mechanical adjustment for the magnetic fields of the present invention, compared with prior art electromagnet adjustment methods include greater reliability, simplicity, lower cost, and lack of power dissipation. The invention may employ either permanent magnets or electromagnets for generation of the mass-separation magnetic field.
Anmelder
- Firma
- FEI Company
- Land
- 🇺🇸 USA
US-amerikanischer Hersteller von Elektronenmikroskopen und wissenschaftlichen Bildgebungssystemen, seit 2016 Teil von Thermo Fisher Scientific. Patente betreffen Elektronen- und Ionenmikroskopie sowie Materialanalyse.
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