Verfahren zur Einstellung eines STEMs mit Aberrationskorrektor

Details

Veröffentlichungs-Nr.

EP2584585

Aktenzeichen

EP12188969

Anmeldetag

18. Oktober 2012

Veröffentlichung

25. Februar 2015

Erteilung

25. Februar 2015

Rechtsraum

EP

IPC

H01J37/153H01J37/26H01J37/28// H01J37/20

Abstract

The invention relates to a method for adjusting a C<s> corrector in a STEM using a crystalline sample. The method comprises recording a through-focus series (104), converting the obtained images to Fourier space (106), thus forming a set of images alike diffraction images. By then determining the symmetry of the Fourier images (108), the corrector can be tuned for better symmetry (110), and the transfer limit can be determined by determining the maximum distance of the spots from the centre. By repeatedly performing these steps, the corrector can be tuned to its optimum performance. <img class="EMIRef" id="124949504-iaf01" />

Anmelder

Firma

FEI COMPANY

Land

🇺🇸 USA

Fachgebiete