Transmissionselektronenmikroskop und Verfahren zum Betrachten von TEM-Bildern

Details

Veröffentlichungs-Nr.

EP2590205

Aktenzeichen

EP12190836

Anmeldetag

31. Oktober 2012

Veröffentlichung

5. November 2014

Rechtsraum

EP

IPC

H01J37/26

Abstract

A transmission electron microscope (TEM) is offered which can reduce the effects of a magnetic field on a sample during observation of a TEM image. The transmission electron microscope (100) includes an electron beam source (2), an illumination lens (4), a first objective lens (6), a second objective lens (8), a selected area aperture (16), a projector lens (10), a detector (12), and a control portion (22). This control portion controls at least the illumination lens (4), second objective lens (8), and projector lens (10). A first plane (17) is located between the second objective lens (8) and the projector lens (10). The control portion (22) performs first sets of processing for controlling the illumination lens (4) such that an electron beam (L) hits the sample (S), controlling the second objective lens (8) such that a diffraction pattern of the sample (S) is imaged onto the first plane (17), and controlling the projector lens (10) such that a TEM image of the sample (S) formed by the second objective lens (8) is focused onto a second plane where the light-sensitive portion (13) of the detector (12) is disposed. <img class="EMIRef" id="135545183-iaf01" />

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete