Bestimmung von Emissionsparametern von Feldemissionsquellen
Anmelder: FEI Company 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP2613338
- Aktenzeichen
- EP13150442
- Anmeldetag
- 8. Januar 2013
- Veröffentlichung
- 30. März 2016
- Erteilung
- 30. März 2016
- Rechtsraum
- EP
- IPC
- H01J37/073
Abstract
The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor ² function is determined by a series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.
Anmelder
- Firma
- FEI Company
- Land
- 🇺🇸 USA
US-amerikanischer Hersteller von Elektronenmikroskopen und wissenschaftlichen Bildgebungssystemen, seit 2016 Teil von Thermo Fisher Scientific. Patente betreffen Elektronen- und Ionenmikroskopie sowie Materialanalyse.
506 Patente in unserer Datenbank