Kalibrierung von Mikrospiegelarrays

Details

Veröffentlichungs-Nr.

EP2618201

Aktenzeichen

EP12152010

Anmeldetag

20. Januar 2012

Veröffentlichung

4. November 2015

Erteilung

4. November 2015

Rechtsraum

EP

IPC

G02B26/08G02B6/35

Abstract

Described herein is a built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles (530) to provide a capacitance-reference angle relationship (540). From the capacitance values, an interpolation step (550) is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured (560). For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use (570).

Anmelder

Firma

IMEC

Land

🇧🇪 Belgien

Fachgebiete