Flüchtige Monoamino-dialkoxysilane und deren Verwendung zur Herstellung von Silizium-haltigen Filmen

Details

Veröffentlichungs-Nr.

EP2620440

Aktenzeichen

EP13152729

Anmeldetag

25. Januar 2013

Veröffentlichung

4. April 2018

Erteilung

4. April 2018

Rechtsraum

EP

IPC

C09D7/63C07F7/18C07F7/10

Abstract

Alkoxyaminosilane compounds having formula I, and processes and compositions for depositing a silicon-containing film, are described herein: (R<1>R<2>)NSiR<3>OR<4>OR<5> Formula (I) wherein R<1>is independently selected from a linear or branched C<1>to C<10>alkyl group; a C<2>to C<12>alkenyl group; a C<2>to C<12>alkynyl group; a C<4>to C<10>cyclic alkyl group; and a C<6>to C<10>aryl group; R<2>and R<3>are each independently selected from hydrogen; a linear or branched C<1>to C<10>alkyl group; a C<3>to C<12>alkenyl group, a C<3>to C<12>alkynyl group, a C<4>to C<10>cyclic alkyl group, and a C<6>to C<10>aryl group; and R<4>and R<5>are each independently selected from a linear or branched C<1>to C<10>alkyl group; a C<2>to C<12>alkenyl group; a C<2>to C<12>alkynyl group; a C<4>to C<10>cyclic alkyl group; and a C<6>to C<10>aryl group.

Anmelder

Firmen

Versum Materials US, LLC
AIR PRODUCTS AND CHEMICALS, INC.

Land

🇺🇸 USA

Fachgebiete