Verbesserte Bearbeitung und Abbildung mittels Ionenstrahl einer Plasmaionenquelle

Details

Veröffentlichungs-Nr.

EP2669925

Aktenzeichen

EP13169946

Anmeldetag

31. Mai 2013

Veröffentlichung

26. August 2020

Erteilung

26. August 2020

Rechtsraum

EP

IPC

H01J37/02H01J37/16H01J37/18H01J37/08

Abstract

Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system (299) using a plasma source (202, 201). The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers (206, 210, 214) below the plasma source (202) to reduce the opportunity for the ions to interact with gas.

Anmelder

Firma

FEI COMPANY

Land

🇺🇸 USA

Fachgebiete