Teilchenstrahlensäule mit integriertem Bremsfeldanalysiergerät

Details

Veröffentlichungs-Nr.

EP2725602

Aktenzeichen

EP13189977

Anmeldetag

24. Oktober 2013

Veröffentlichung

26. Juli 2017

Erteilung

26. Juli 2017

Rechtsraum

EP

IPC

H01J37/244

Abstract

A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. In a method of analyzing the energy of a charged particle beam, a retarding field through which the beam (114) passes is provided by applying a voltage to the element (116B) of the electrostatic focusing lens (116) retarding the beam, and the retarding field is incrementally increased by incrementally changing this voltage to alter the number of charged particles that pass through the electrostatic lens. Using components of the existing column reduces the time required to analyze the beam. Using the imaging capabilities of the existing column facilitates alignment of the beam with the analyzer.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete