Raster-Teilchenmikroskop, Bilderfassungsverfahren und Elektronendetektionsverfahren

Details

Veröffentlichungs-Nr.

EP2804199

Aktenzeichen

EP14168549

Anmeldetag

15. Mai 2014

Veröffentlichung

14. Dezember 2016

Erteilung

14. Dezember 2016

Rechtsraum

EP

IPC

H01J37/244H01J37/28H01J37/22

Abstract

A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).

Anmelder

Firmen

JEOL LTD.
JEOL Ltd.

Land

🇯🇵 Japan

Fachgebiete