Schaltungssonde für Ladungsträgerstrahlsystem
Anmelder: FEI COMPANY 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP2838107
- Aktenzeichen
- EP14180858
- Anmeldetag
- 13. August 2014
- Veröffentlichung
- 1. Juni 2016
- Erteilung
- 1. Juni 2016
- Rechtsraum
- EP
- IPC
- H01J37/20G01R31/28H01J37/305
Abstract
A probe assembly can be selectively connected and disconnected from its electrical harness within a vacuum chamber by motion of a stage supporting the probe assembly, so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.
Anmelder
- Firma
- FEI COMPANY
- Land
- 🇺🇸 USA
US-amerikanischer Hersteller von Elektronenmikroskopen und wissenschaftlichen Bildgebungssystemen, seit 2016 Teil von Thermo Fisher Scientific. Patente betreffen Elektronen- und Ionenmikroskopie sowie Materialanalyse.
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