MEMS-Sensor mit Anordnung zur Reduzierung von nichtlinearer Bewegung

Details

Veröffentlichungs-Nr.

EP2899503

Aktenzeichen

EP15152031

Anmeldetag

21. Januar 2015

Veröffentlichung

25. November 2020

Erteilung

25. November 2020

Rechtsraum

EP

IPC

G01C19/5733G01C19/5747G01C19/5762G01P15/08B81B3/00

Abstract

Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor, such as a gyroscope. Examples of gyroscope configurations (11A, 12A, 13A) includes at least one pair of counter-rotating arms (21A, 21B, 22A, 22B, 23A, 23B) linked to two traveling masses (31A, 31B, 32A, 32B, 33A, 33B). The modifications include any or any combination of providing a rigid element (21) between rotating structures of the spring mass configuration including the traveling masses (31A, 31B), tuning a spring system (22, 42A, 42B) between the rotating structures including the traveling masses (32A, 32B) and the rotating arms (12A, 12B) and coupling an electrical cancellation system (73A, 73B, 74A, 74B) to the rotating structures including the traveling masses (33A, 33B) and the rotating arms (23A, 23B). In so doing, unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

Anmelder

Firma

InvenSense, Inc.

Land

🇺🇸 USA

Fachgebiete