Korrelatives optisches und Teilchenstrahlmikroskop

Details

Veröffentlichungs-Nr.

EP2899743

Aktenzeichen

EP14152582

Anmeldetag

27. Januar 2014

Veröffentlichung

21. September 2016

Erteilung

21. September 2016

Rechtsraum

EP

IPC

H01J37/22H01J37/26

Abstract

The invention relates to a Correlative Light and Electron Microscope (CLEM), equipped with a TEM column and a light microscope (10), the light microscope fitting between the pole shoes (8A, 8B) of the objective lens of the TEM. To enlarge the acceptance solid angle for enhanced sensitivity a truncated lens is used. It is noted that this does not imply that the lens shows astigmatism (it is not a cylindrical lens). The invention further teaches to make, using the light microscope, a first image with the sample (1) in a first direction. This image will show in one direction a higher (diffraction limited) resolution than in the direction perpendicular thereto, due to the different NA of the lens in the two directions (312 x , 312 y ). By rotating the sample and make a second image, a combined image can be formed showing a better resolution than either of the images in the direction where they show a low NA.

Anmelder

Firma

FEI COMPANY

Land

🇺🇸 USA

Fachgebiete