Vorrichtung und Verfahren zur Berechnung der Drift und System mit Geladenem Teilchenstrahl

Details

Veröffentlichungs-Nr.

EP2940711

Aktenzeichen

EP15164951

Anmeldetag

24. April 2015

Veröffentlichung

15. September 2021

Erteilung

15. September 2021

Rechtsraum

EP

IPC

H01J37/244G06T7/00

Abstract

A drift amount computing device capable of precisely computing an amount of drift is offered. The drift amount computing device (100) is used to compute an amount of drift between a first image and a second image, and comprises a correlation function computing section (112) for calculating a correlation function between the first and second images, a local maximum position searching section (114) for searching a range of positions of the correlation function for local maximum positions at which the correlation function assumes its local maxima, a local maximum position determining section (116) for assigning weights to intensities of plural local maximum positions searched for by the local maximum position searching section (114) according to the distance from the center of the correlation function, comparing the weighted intensities of the local maximum positions, and determining one of the maximum local positions which corresponds to the amount of drift, and a drift amount computing section (118) for computing the amount of drift, based on the local maximum position corresponding to the amount of drift.

Anmelder

Firmen

JEOL Ltd.
JEOL LTD.

Land

🇯🇵 Japan

Fachgebiete