Zweidimensionaler Optischer Ablenker mit Zwei Soi-Strukturen und dessen Herstellungsverfahren

Details

Veröffentlichungs-Nr.

EP2947497

Aktenzeichen

EP15167660

Anmeldetag

13. Mai 2015

Veröffentlichung

11. Oktober 2017

Erteilung

11. Oktober 2017

Rechtsraum

EP

IPC

G02B26/08G02B26/10B81C1/00G02B7/182

Abstract

A two-dimensional optical deflector includes a first S0I structure (S1) and a second S0I structure (S2). A height (h1) of a monocrystalline silicon support layer (101) of the first S0I structure (S1) is smaller than a height (h3) of a monocrystalline silicon support layer (201) of the second S0I structure (S2). A mirror (1) includes a monocrystalline silicon active layer (203) of the first S0I structure (S1). An inner frame (3), an inner piezoelectric actuator (4a, 4b; 14a, 14b) and an outer frame (5) include a monocrystalline silicon active layer (103) of the first S0I structure (S1) and the monocrystalline silicon active layer (203) of the second S0I structure (S2). An outer piezoelectric actuator (6a, 6b) includes the monocrystalline silicon active layer (103) of the first S0I structure (S1).

Anmelder

Firmen

STANLEY ELECTRIC CO., LTD.
Stanley Electric Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete