Verfahren zur Strukturierung einer Unterschicht

Details

Veröffentlichungs-Nr.

EP3062334

Aktenzeichen

EP15157046

Anmeldetag

27. Februar 2015

Veröffentlichung

5. August 2020

Erteilung

5. August 2020

Rechtsraum

EP

IPC

H01L21/033

Abstract

A method for patterning an underlying layer is described, the method comprising - providing a guiding layer on the underlying layer, the guiding layer comprising guiding structures and being substantially planar; - providing a block-copolymer layer on the guiding layer; - inducing phase separation of the block-copolymer layer in a regular pattern of structures of a first and a second polymer component, whereby one of the components aligns to the guiding structures, by chemo-epitaxy; - thereafter, removing a first of the components of the block-copolymer layers completely, leaving a regular pattern of structures of the second component; - providing a planarising layer over the regular pattern of structures of the second component and the guiding layer; - removing a portion of the planarising layer, thereby leaving a regular pattern of structures of the planarising layer at positions in between the structures of the second component, and exposing the structures of the second component; - removing the structures of the second component, selectively with respect to the structures of the planarising layer; - patterning the underlying layer, thereby using the structures of the planarising layer as a mask.

Anmelder

Firma

IMEC VZW

Land

🇧🇪 Belgien

Fachgebiete