Behälter und Verfahren zur Abgabe von Vorläufermaterialien

Details

Veröffentlichungs-Nr.

EP3081668

Aktenzeichen

EP16165879

Anmeldetag

18. April 2016

Veröffentlichung

25. August 2021

Erteilung

25. August 2021

Rechtsraum

EP

IPC

C23C16/448

Abstract

A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel using a carrier gas. The vessel defines an interior volume segmented into an upper volume and a lower volume, the upper volume being in fluid communication with the lower volume, the lower volume containing substantially all of the precursor material and being separated from the upper volume by a separator. The vessel includes a diffuser tube that extends from an inlet port, through the separator and has a distal end having a plurality of openings formed therein and extends along the bottom interior wall of the vessel.

Anmelder

Firmen

Versum Materials US, LLC
AIR PRODUCTS AND CHEMICALS, INC.

Land

🇺🇸 USA

Fachgebiete