Kompaktes Interferometer

Details

Veröffentlichungs-Nr.

EP3088855

Aktenzeichen

EP15165296

Anmeldetag

28. April 2015

Veröffentlichung

21. Oktober 2020

Erteilung

21. Oktober 2020

Rechtsraum

EP

IPC

G01J3/453G01J3/02G02B6/293

Abstract

An interferometer (100) comprising a multimode waveguide (120) to which an input waveguide (110) is coupled at one side thereof. A first waveguide (130) is optically coupled to a second side of the multimode waveguide (120), and is terminated by a first waveguide mirror (150). A second waveguide (140) may be optically coupled to a second side of the multimode waveguide (120) and terminated by a second waveguide mirror (160), or a second waveguide mirror (160) may be directly optically coupled to a second side of the multimode waveguide (120). The multimode waveguide is adapted to distribute a light signal from the input waveguide (110) towards the first (150) and second (160) waveguide mirror via the first waveguide (130) and, if present, via the second waveguide (140). The interferometer comprises at least one signal readout structure (170) positioned for receiving reflected light from the first (150) and/or second (160) waveguide mirror with a power that depends on the phase difference between the two reflected waves.

Anmelder

Firmen

IMEC VZW
Samsung Electronics Co., Ltd.

Land

🇧🇪 Belgien

Fachgebiete