Verfahren zur Herstellung von Substraten

Details

Veröffentlichungs-Nr.

EP3093105

Aktenzeichen

EP16169066

Anmeldetag

10. Mai 2016

Veröffentlichung

24. Juni 2020

Erteilung

24. Juni 2020

Rechtsraum

EP

IPC

B24B37/10B24B37/04B24B37/08B24B7/22B24B7/24

Abstract

Proposed herein is a method for producing substrates, particularly those of synthetic quartz glass, while saving the substrate surface from killer defects without resorting to any large-scale apparatus and precision polishing plate, thereby reducing defectives and improving yields more than in production with conventional facilities. The method for producing substrates by polishing, includes steps of placing substrate stocks individually in work holes formed in a carrier on a lower polishing plate, bringing an upper polishing plate into contact with the surface of the substrate stocks, with the surface of the substrate stocks being coated with an impact-absorbing liquid and the lower polishing plate being rotated, and rotating the upper and lower polishing plates, with the surface of the substrate stocks being accompanied by a polishing slurry.

Anmelder

Firma

Shin-Etsu Chemical Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete