Verfahren zum Abbilden einer Probe mit einem Strahl Geladener Teilchen unter Verwendung eines Abbildungsgases

Details

Veröffentlichungs-Nr.

EP3096343

Aktenzeichen

EP16169828

Anmeldetag

17. Mai 2016

Veröffentlichung

27. Dezember 2017

Erteilung

27. Dezember 2017

Rechtsraum

EP

IPC

H01J37/244// H01J37/18H01J37/22H01J37/28

Abstract

Charged particle beam imaging and measurement systems are provided using gas amplification with an improved imaging gas. The system includes a charged particle beam source for directing a charged particle beam to work piece, a focusing lens for focusing the charged particles onto the work piece, and an electrode for accelerating secondary electrons generated from the work piece irradiation by the charged practice beam, or another gas cascade detection scheme. The gas imaging is performed in a high pressure scanning electron microscope (HPSEM) chamber for enclosing the improved imaging gas including CH 3 CH 2 OH (ethanol) vapor. The electrode accelerates the secondary electrons though the CH 3 CH 2 OH to ionize the CH 3 CH 2 OH through ionization cascade to amplify the number of secondary electrons for detection. An optimal configuration is provided for use of the improved imaging gas, and techniques are provided to conduct imaging studies of organic liquids and solvents, and other CH 3 CH 2 OH-based processes.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete