Mems-Vorrichtung mit Gleichtaktunterdrückungsstruktur
Anmelder: NXP USA, Inc. 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP3106834
- Aktenzeichen
- EP16174745
- Anmeldetag
- 16. Juni 2016
- Veröffentlichung
- 5. Juni 2024
- Erteilung
- 5. Juni 2024
- Rechtsraum
- EP
- IPC
- G01C19/5747
Abstract
A MEMS device includes a drive spring system coupling a pair of drive masses and a sense spring system coupling a pair of sense masses. The drive spring system includes a constrained stiff beam and flexures interconnecting the pair of drive masses. In response to drive movement of the drive masses the flexures enable pivotal movement of the constrained stiff beam about its center hinge point to enable anti-phase drive motion of the drive masses and to suppress in-phase motion of the drive masses. The sense spring system includes diagonally oriented stiff beams and a spring system that enable anti-phase sense motion of the sense masses while suppressing in-phase motion of the sense masses. Coupling masses interposed between the drive and sense masses decouple the drive motion of the drive masses from the sense motion of the sense masses.
Anmelder
- Firma
- NXP USA, Inc.
- Land
- 🇺🇸 USA
US-amerikanische Gesellschaft des Halbleiterkonzerns NXP, die Chips und Halbleiterlösungen für Automobiltechnik, Kommunikation und Industrieelektronik entwickelt.
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