Verfahren zum Herstellen einer auf Graphen Basierdenden Feldeffektvorrichtung

Details

Veröffentlichungs-Nr.

EP3131121

Aktenzeichen

EP15180829

Anmeldetag

12. August 2015

Veröffentlichung

9. Mai 2018

Erteilung

9. Mai 2018

Rechtsraum

EP

IPC

H01L29/417G01N27/414H01L29/423H01L29/43H01L29/778H01L29/16H01L29/40H01L21/336H01L21/20

Abstract

A method comprising: growing a layer of channel material (501), preferably graphene, on a growth wafer (512) to form a channel member, the growth wafer comprising a layer of catalyst material (511) separated from a carrier wafer (512) by a layer of release material (513), the catalyst material serving as a seed layer for growing the layer of channel material; depositing a layer of polymeric material (502) over the formed channel member to form a supporting substrate for the layers of catalyst and channel material; etching the layer of release material (513) to remove the release material and carrier wafer; and patterning the layer of catalyst material (511) to form source and drain electrodes (516) configured to enable a flow of electrical current through the channel member.

Anmelder

Firmen

Provenance Asset Group LLC
Nokia Technologies Oy

Land

🇺🇸 USA

Fachgebiete