Neuartige Erfassung und Verarbeitung von Daten in einer Tomografischen Abbildungsvorrichtung

Details

Veröffentlichungs-Nr.

EP3133554

Aktenzeichen

EP15181202

Anmeldetag

17. August 2015

Veröffentlichung

10. Juli 2019

Erteilung

10. Juli 2019

Rechtsraum

EP

IPC

G06T11/00G01N23/046

Abstract

A method of investigating a specimen using a tomographic imaging apparatus comprising: - A specimen holder, for holding the specimen; - A source, for producing a beam of radiation that can be directed at the specimen; - A detector, for detecting a flux of radiation transmitted through the specimen from the source; - A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; - A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen, which method comprises the following steps: - Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; - Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; - Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete