Neuartige Datenverarbeitung in einer Tomographischen Bildgebungsvorrichtung

Details

Veröffentlichungs-Nr.

EP3133555

Aktenzeichen

EP16180432

Anmeldetag

20. Juli 2016

Veröffentlichung

10. April 2019

Erteilung

10. April 2019

Rechtsraum

EP

IPC

G01N23/046G06T11/00

Abstract

A method of investigating a specimen (S) using a tomographic imaging apparatus comprising: - A specimen holder, for holding the specimen; - A source (Sx), for producing a beam (B) of radiation that can be directed at the specimen (S); - A detector (D), for detecting a flux of radiation transmitted through the specimen (S) from the source (Sx); - A stage apparatus (A), for producing relative motion of the source (Sx) with respect to the specimen (S), so as to allow the source (Sx) and detector (D) to image the specimen (S) along a series of different viewing axes (V<i>); - A processing apparatus, for performing a mathematical reconstruction step whereby output from the detector is compiled into a tomographic image of at least part of the specimen (S), wherein said reconstruction step is performed in multiple iterations, which comprise the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images; (iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion. It is also provided a scanning electron microscope (1) including an in-situ computerised tomography (CT) module (7'') for performing CT inspection in-situ inside the chamber of the microscope (1).

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete