Analyseverfahren und Röntgenlichtelektronenspektroskop

Details

Veröffentlichungs-Nr.

EP3139158

Aktenzeichen

EP16187259

Anmeldetag

5. September 2016

Veröffentlichung

3. März 2021

Erteilung

3. März 2021

Rechtsraum

EP

IPC

G01N23/2273G01N23/2276

Abstract

An analysis method includes: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen (S) by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen (S) by irradiating the specimen (S) with X-rays; calculating a quantitative value of each element included in the specimen (S) based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen (S).

Anmelder

Firma

JEOL LTD.

Land

🇯🇵 Japan

Fachgebiete